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Heating, venting and aerosol particles dynamics in a vacuum clean chamber: An analytical investigation
| Title: | Heating, venting and aerosol particles dynamics in a vacuum clean chamber: An analytical investigation. |
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| Name(s): |
Li, Jiyue. Florida Atlantic University, Degree grantor Su, Tsung-Chow, Thesis advisor College of Engineering and Computer Science Department of Ocean and Mechanical Engineering |
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| Type of Resource: | text | |
| Genre: | Electronic Thesis Or Dissertation | |
| Issuance: | monographic | |
| Date Issued: | 1989 | |
| Publisher: | Florida Atlantic University | |
| Place of Publication: | Boca Raton, Fla. | |
| Physical Form: | application/pdf | |
| Extent: | 60 p. | |
| Language(s): | English | |
| Summary: | It is empirically observed and broadly used in the semiconductor manufacturing industry that the clean environment of in-vacuum processing can be enhanced through heating from outside the clean chamber. This paper reports an analytical investigation of this problem and presents the results that confirm the speeding effects of changing the temperature gradient at one end of the clean chamber on venting the aerosol particles from inside the clean chamber. First, a mathematical frame for the basic problem is formulated and then various analytical techniques are employed to reduce a set of coupled nonlinear partial differential equations to linear equations, and finally, numerical results are obtained from explicit, analytical formulas. | |
| Identifier: | 14524 (digitool), FADT14524 (IID), fau:11322 (fedora) | |
| Collection: | FAU Electronic Theses and Dissertations Collection | |
| Note(s): |
College of Engineering and Computer Science Thesis (M.S.E.)--Florida Atlantic University, 1989. |
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| Subject(s): | Clean rooms--Heating and ventilation | |
| Held by: | Florida Atlantic University Libraries | |
| Persistent Link to This Record: | http://purl.flvc.org/fcla/dt/14524 | |
| Sublocation: | Digital Library | |
| Use and Reproduction: | Copyright © is held by the author, with permission granted to Florida Atlantic University to digitize, archive and distribute this item for non-profit research and educational purposes. Any reuse of this item in excess of fair use or other copyright exemptions requires permission of the copyright holder. | |
| Use and Reproduction: | http://rightsstatements.org/vocab/InC/1.0/ | |
| Host Institution: | FAU | |
| Is Part of Series: | Florida Atlantic University Digital Library Collections. |
