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Heating, venting and aerosol particles dynamics in a vacuum clean chamber: An analytical investigation
Title
Heating, venting and aerosol particles dynamics in a vacuum clean chamber: An analytical investigation.
Creator
Li, Jiyue., Florida Atlantic University, Su, Tsung-Chow, College of Engineering and Computer Science, Department of Ocean and Mechanical Engineering
Abstract/Description
It is empirically observed and broadly used in the semiconductor manufacturing industry that the clean environment of in-vacuum processing can be enhanced through heating from outside the clean chamber. This paper reports an analytical investigation of this problem and presents the results that confirm the speeding effects of changing the temperature gradient at one end of the clean chamber on venting the aerosol particles from inside the clean chamber. First, a mathematical frame for the...
Show moreIt is empirically observed and broadly used in the semiconductor manufacturing industry that the clean environment of in-vacuum processing can be enhanced through heating from outside the clean chamber. This paper reports an analytical investigation of this problem and presents the results that confirm the speeding effects of changing the temperature gradient at one end of the clean chamber on venting the aerosol particles from inside the clean chamber. First, a mathematical frame for the basic problem is formulated and then various analytical techniques are employed to reduce a set of coupled nonlinear partial differential equations to linear equations, and finally, numerical results are obtained from explicit, analytical formulas.
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Date Issued
1989
PURL
http://purl.flvc.org/fcla/dt/14524
Subject Headings
Clean rooms--Heating and ventilation
Format
Document (PDF)
Air quality in a conference room
Title
Air quality in a conference room.
Creator
Wang, Tsen C., Krivan, J. P., Jr., Harbor Branch Oceanographic Institute
Date Issued
1977
PURL
http://purl.flvc.org/FCLA/DT/3179312
Subject Headings
Air quality, Indoor air quality, Ventilation, Indoor air pollution
Format
Document (PDF)
Air quality in a conference room
Title
Air quality in a conference room.
Creator
Wang, Tsen C., Harbor Branch Oceanographic Institute
Date Issued
1978
PURL
http://purl.flvc.org/fcla/dt/3318948
Subject Headings
Indoor air quality, Indoor air pollution, Air quality --Evaluation, Ventilation, Air conditioning
Format
Document (PDF)